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Fundamentals of microfabrication and nanotechnology / Madou, Marc J.

By: Material type: TextTextLanguage: English Publication details: London : CRC Press, 2012.Edition: 3rd EditionDescription: xiii, 641 p. ; 26 cmISBN:
  • 9781420055160
Subject(s): DDC classification:
  • 670 MAD
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