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Fundamentals of microfabrication and nanotechnology /

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology / Madou, Marc J. - 3rd Edition. - London : CRC Press, 2012. - xiii, 641 p. ; 26 cm.

ISBN: 9781420055160

Subjects--Topical Terms:
Nanotechnology

Dewey Class. No.: 670 / MAD

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