| 000 | 00561nam a2200217Ia 4500 | ||
|---|---|---|---|
| 001 | 8210 | ||
| 003 | IN-BdCUP | ||
| 005 | 20230731123126.0 | ||
| 008 | 230413s9999 000 0 eng | ||
| 020 | _a9781420055160 | ||
| 040 |
_beng _cIN-BdCUP |
||
| 041 | _aeng | ||
| 082 |
_a670 _bMAD |
||
| 100 | _aMadou, Marc J. | ||
| 245 | 0 |
_aFundamentals of microfabrication and nanotechnology / _cMadou, Marc J. |
|
| 250 | _a3rd Edition. | ||
| 260 |
_aLondon : _bCRC Press, _c2012. |
||
| 300 |
_axiii, 641 p. ; _c26 cm. |
||
| 650 | _aNanotechnology | ||
| 942 |
_2ddc _cREF |
||
| 999 |
_c540 _d540 |
||